Electron Beam Heated Evaporation Using a Porous Material.

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

An Electron Beam Heated Evaporation Source

An electron beam evaporator has been assembled, tested and used for deposition of thin nickel films. Flux and deposition rates has been measured with an oscillating quartz crystal monitor (QCM), an ion sensor wire, and visible deposition on a mirror on front of the evaporator. A thin nickel rod of 2 mm diameter was found to improve the pressure in comparison to a 6-mm nickel rod. The flux was t...

متن کامل

Study on the effect of electron beam curing on low-K porous organosilicate glass (OSG) material

The effect of electron beam (e-beam) curing on an ultra low dielectric constant material, porous organosilicate glass (OSG) is investigated. In conventional IC integration processes, photoresist (P. R.) stripping with O2 plasma and wet chemical stripper is an inevitable step. However, dielectric degradation often occurs when low-k dielectrics undergo the PR stripping processing. This limits the...

متن کامل

Silicon nanowires prepared by electron beam evaporation in ultrahigh vacuum

One-dimensional silicon nanowires (SiNWs) were prepared by electron beam evaporation in ultrahigh vacuum (UHV). The SiNWs can be grown through either vapor-liquid-solid (VLS) or oxide-assisted growth (OAG) mechanism. In VLS growth, SiNWs can be formed on Si surface, not on SiO2 surfaces. Moreover, low deposition rate is helpful for producing lateral SiNWs by VLS. But in OAG process, SiNWs can b...

متن کامل

Ultraflat carbon film electrodes prepared by electron beam evaporation.

A facile method for the preparation of thin-film carbon electrodes by electron beam evaporation onto highly doped silicon is presented. The physical and electrochemical properties of these films both before and after postdeposition pyrolysis are investigated. Raman spectroscopy establishes the amorphous structure of the nonpyrolyzed carbon films and confirms the formation of graphitic carbon af...

متن کامل

Light scattering study of collective effects during evaporation and condensation in a disordered porous material

We combine high-resolution isotherms measurements and light scattering technics to study over a broad temperature range collective effects during the condensation and evaporation of helium from Vycor, a prototypic disordered porous material. For evaporation, our results provide the first direct evidence for a crossover from a percolation collective mechanism at low temperature to a local cavita...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: SHINKU

سال: 1997

ISSN: 0559-8516,1880-9413

DOI: 10.3131/jvsj.40.296